Discharge Apparatus, Forming Apparatus, and Method of Producing Formed Body

ABSTRACT

A discharge apparatus, a forming apparatus, a method of operating the discharge apparatus, and a method of producing a formed body are disclosed herein. In some embodiments, a discharge apparatus is used to collide a particle with a fixed surface to fix the particle to the fixed surface, the discharge apparatus includes a first dispenser for discharging an aerosol containing the particle toward the fixed surface at a first discharge rate, and a second dispenser for discharging a gas toward the fixed surface at a second discharge rate faster than the first discharge rate, and the second dispenser discharges the gas so that the gas at least partially overlaps with the aerosol to accelerate at least a portion of the aerosol toward the fixed surface to fix the particle to the fixed surface.

CROSS-REFERENCE TO RELATED APPLICATION(S)

The present disclosure is a national phase entry under 35 U.S.C. § 371of International Application No. PCT/KR2019/017065, filed on Dec. 5,2019, which claims priority to and the benefits of Japanese PatentApplication No. 2018-229026, filed with the Japanese Patent Office onDec. 6, 2018, the disclosures of which are incorporated by referenceherein.

TECHNICAL FIELD

The present disclosure relates to a discharge apparatus, a formingapparatus, and a method of producing a formed body.

BACKGROUND ART

In recent years, three-dimensional prototyping techniques that use nomold have been developed to perform shaping of inorganic materials suchas metals or metal oxides, organic⋅inorganic hybrid materials, or thelike so as to have any three-dimensional shape.

For example, stereolithography, which is a representativethree-dimensional prototyping technique for inorganic materials, isdisclosed in Japanese Patent No. 4800074 (Patent Document 1) and thelike. In the stereolithography, a formed body is once made of a binder(photocurable composition or the like) and inorganic particles dispersedtherein, and then is heated to degrease the binder, and further, theformed body made of the inorganic particles after degreasing issubjected to high temperature firing to sinter the inorganic particles.

Meanwhile, a technique has been developed to form a thin film made ofmicroparticles on a substrate at room temperature without using a binderby colliding an aerosol containing the microparticles with the substrateat high rate. According to this technique, the microparticles in theaerosol can be fixed to the substrate without performing a heatingoperation. The thin film thus formed is obtained in a state such assintering at high temperature.

PRIOR ART DOCUMENT Patent Document

-   (Patent Document 1): Japanese Patent No. 4800074

DISCLOSURE Technical Problem

In the stereolithography, there has been a case where if thethree-dimensional shape becomes complicated, the residue of thethermally decomposed binder cannot be sufficiently removed from theformed body in the degreasing process. Further, in the sinteringprocess, there has been a case where defect such as crack or damage inthe formed body after the sintering is caused by a difference betweenthermal expansion rates for each portion of the formed body or the like.

Meanwhile, in order to apply to a bottom-up type three-dimensionalshaping, a collision fixing method of the aerosol requires to form asimilar sintered body as described above in a small size by intensivelycolliding the aerosol with a small region on the substrate, rather thandischarging it to a large area as in the case of forming the thin film.However, since the aerosol sprayed from a dispenser has certain degreeof spread until reaching the substrate, the particle collided with andfixed to the substrate is distributed on the substrate with a constantspread with respect to right below the dispenser. The fixed particle isthe densest at the center of this distribution, and become sparser as itis away outward from the center of the distribution.

In the case of trying to directly fix the aerosol by spraying it fromthe dispenser toward the substrate, the distribution having a largespacing variation over such a relatively large region inevitably occurs,such that it has been difficult to limit the region where the particleis fixed to the desired small area.

An object of the present disclosure is to provide a discharge apparatus,a forming apparatus, and a method of producing a formed body havingimproved controllability of the fixed position of particle.

Technical Solution

One aspect of the present disclosure, as a discharge apparatus used tocollide a particle with a fixed surface to fix the particle to the fixedsurface, is the discharge apparatus including a first dispenser fordischarging an aerosol containing the particle toward the fixed surfaceat a first discharge rate, and a second dispenser for discharging a gastoward the fixed surface at a second discharge rate faster than thefirst discharge rate, and the second dispenser discharges the gas sothat the gas at least partially overlaps the aerosol discharged from thefirst dispenser to accelerate at least a portion of the aerosol towardthe fixed surface to fix the particle to the fixed surface.

In the discharge apparatus of the aspect, the first discharge rate canbe a rate at which the particle is not substantially fixed to the fixedsurface if the aerosol discharged at the first discharge rate hascollided with the fixed surface, and the second discharge rate can be arate at which the particle is substantially fixed to the fixed surfaceif the aerosol discharged at the second discharge rate has collided withthe fixed surface.

In the discharge apparatus of the aspect, the particle can besubstantially fixed to the fixed surface if the aerosol has beendischarged at a rate of any threshold (hereinafter, referred to as ‘acritical rate’) or more to collide with the fixed surface, the firstdischarge rate can be smaller than the critical rate of the particle,and the second discharge rate can be the critical rate or more of theparticle.

In the discharge apparatus of the aspect, the first dispenser and thesecond dispenser can be configured so that a ratio of an area where thefixed particle covers a first portion of the fixed substrate and an areaof the first portion is larger than a ratio of an area where the fixedparticle covers a second portion of the fixed substrate and an area ofthe second portion if both the aerosol and the gas collide with thefirst portion of the fixed surface, and the aerosol collides with thesecond portion of the fixed surface but the gas does not collide withthe second portion. Further, the first dispenser and the seconddispenser can be configured so that the particle is fixed in the firstportion, and the particle is not fixed in the second portion.

In the discharge apparatus of the aspect, the discharge apparatus canfurther include a first dispenser moving mechanism for changing theposition and direction of the first dispenser, and a second dispensermoving mechanism for changing the position and direction of the seconddispenser, and the first dispenser moving mechanism and the seconddispenser moving mechanism can change a distance between the firstdispenser and the second dispenser and an angle between a direction inwhich the first dispenser discharges the aerosol and a direction inwhich the second dispenser discharges the gas.

Another aspect of the present disclosure is a forming apparatusincluding a stage having a fixed surface, and a discharge apparatus ofany one aspect described above.

In the forming apparatus of the aspect, the forming apparatus canfurther include a control unit for controlling the discharge apparatusso that a formed body having a three-dimensional shape is formed, basedon three-dimensional shape data of the formed body. Further, the formingapparatus can further include a monitoring unit for monitoring theparticle on the fixed surface, and the control unit can determine aregion on the fixed surface where the aerosol is discharged and a regionon the fixed surface where the gas is discharged, based on informationfrom the monitoring unit.

In the forming apparatus of the aspect, the forming apparatus canfurther include a cleaning unit for removing the particle from the fixedsurface if the particle has not been fixed to the fixed surface.Further, the cleaning unit can have an air supply apparatus for blowingoff the particle from the fixed surface if the particle has not beenfixed to the fixed surface. Further, the cleaning unit can have arecovery apparatus for recovering the particle from the fixed surface ifthe particle has not been fixed to the fixed surface.

Still another aspect of the present disclosure, as a method of producinga formed body in a predetermined shape from a fixed particle bycolliding a particle with a fixed surface to fix the particle to thefixed surface, the method includes (a) discharging an aerosol containingthe particle toward the fixed surface at a first discharge rate, andalso discharging a gas, wherein the gas at least partially overlaps withthe aerosol, toward the fixed surface at a second discharge rate fasterthan the first discharge rate to accelerate at least a portion of theaerosol toward the fixed surface to fix the particle to the fixedsurface, and (b) cleaning that removes the particle if the particle hasnot been fixed to the fixed surface from the fixed surface, and (c)repeating steps (a) and (b) to form the formed body can be formed on thefixed surface.

In the method of producing the formed body of the aspect, the method ofproducing the formed body can further include (d) moving the fixedsurface downward in the vertical direction after step (b), and whereinstep (c) further comprises repeating steps (a) to (d) to form the formedbody having a three-dimensional shape.

In the method of producing the formed body of the aspect, the method ofproducing the formed body can further include monitoring the particle onthe fixed surface, and determining a position that determines a regionon the fixed surface where the aerosol is discharged and a region on thefixed surface where the gas is discharged during step (a), based oninformation obtained in the monitoring.

DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic front diagram showing a forming apparatusaccording to an embodiment.

FIG. 2 is a perspective diagram showing the discharged appearance of anaerosol and a gas by a first dispenser and a second dispenser accordingto an embodiment.

FIGS. 3A-D is a diagram virtually showing an operation of the formingapparatus according to an embodiment in the case of having dischargedthe aerosol from the first dispenser at a first discharge rate withoutusing the second dispenser.

FIGS. 4A-D is a diagram virtually showing an operation of the formingapparatus according to an embodiment in the case of having dischargedthe aerosol from the first dispenser at a second discharge rate withoutusing the second dispenser.

FIGS. 5A-D is a diagram showing an operation of the forming apparatusaccording to an embodiment in the case of having discharged the aerosolfrom the first dispenser at the first discharge rate and also havingdischarged the gas from the second dispenser at the second dischargerate.

FIG. 6 is a perspective diagram showing a variation in the dischargedappearance of the aerosol and the gas according to a change in thearrangement of the discharge apparatus according to an embodiment.

FIG. 7 is a perspective diagram showing a variation in the dischargedappearance of the aerosol and the gas according to a change in thearrangement of the discharge apparatus according to an embodiment.

FIG. 8 is a perspective diagram showing a variation in the dischargedappearance of the aerosol and the gas according to a change in thearrangement of the discharge apparatus according to an embodiment.

FIG. 9 is a block diagram showing an example of a system configurationof the forming apparatus according to an embodiment.

FIG. 10 is a flowchart showing an example of a method of producing aformed body by the forming apparatus according to an embodiment.

FIG. 11 is a perspective diagram showing the discharged appearance ofthe aerosol and the gas by a first dispenser and a second dispenseraccording to a modified example of an embodiment.

DESCRIPTION OF REFERENCE NUMERALS

-   -   1: forming apparatus    -   10: stage    -   10 a: fixed surface    -   12: chamber    -   14: discharge apparatus    -   14 a: first discharge apparatus    -   14 b: second discharge apparatus    -   16: monitoring unit    -   18: cleaning unit    -   20: control unit    -   22: stage moving mechanism    -   24: vacuum pump    -   30: first gas cylinder    -   32: first flow rate regulator    -   34: aerosol generator    -   35: second flow rate regulator    -   36: first dispenser    -   38: first dispenser moving mechanism    -   40: second gas cylinder    -   42: third flow rate regulator    -   44: second dispenser    -   46: second dispenser moving mechanism    -   48: discharge control unit    -   50: air supply apparatus    -   52: recovery apparatus    -   54: air supply apparatus moving mechanism    -   56: recovery apparatus moving mechanism    -   61: first portion    -   62: second portion    -   63: third portion    -   70: input unit

BEST MODE

Hereinafter, a discharge apparatus, a forming apparatus, and a method ofproducing a formed body according to embodiments of the presentdisclosure will be described with reference to the accompanyingdrawings. Further, in the following description, the same referencenumerals refer to components having the same or similar function. Theoverlapping description of these components will be appropriatelyomitted.

For convenience of explanation, the x-direction, the y-direction, andthe z-direction will be defined. The x-direction and the y-direction aredirections parallel to the horizontal plane. The y-direction is adirection intersecting (for example, approximately orthogonal) with thex-direction. The z-direction is a direction parallel to the verticaldirection and is approximately orthogonal to the x-direction and they-direction.

In the present specification, an ‘aerosol’ means a sol in which a finesolid particle, a liquid particle, or both has been dispersed in acolloidal form in a gas.

In the present specification, a ‘fixed’ means a state fixed to an objectby a chemical bond or a physical bond. Further, if a large number ofparticles collided with the object are said to be ‘substantially fixed’to the object, it means that 50% or more of the number of particlesamong a large number of particles collided with the object are fixed tothe object. On the contrary, if a large number of particles are said tobe ‘not substantially fixed’ to the object, it means that 90% or more ofthe number of particles among a large number of particles collided withthe object are not fixed to the object. Further, the object to which theparticle is fixed can be a stage, a substrate supported on the stage orthe like, a surface such as another particle or a material film alreadyfixed to the stage or the substrate, but in the present specification,these are collectively referred to as ‘fixed surface.’ However, theobject to be fixed does not necessarily have a large surface, and asdescribed above, a case where a portion of the particle fixed in anisland form is fixed to the stage or the substrate, or the like isreferred to as being ‘fixed to the fixed surface.’ Further, in thepresent specification, the substrate of the case where the substrate isdisposed on the stage is also collectively referred to as ‘stage’.Hereinafter, although the case where the particle is fixed to the stage(or the substrate supported by the stage) is mainly described, thefollowing description is also applied to the case where the particle isfixed to another fixed surface such as another particle.

A forming apparatus 1 according to an embodiment will be described withreference to FIGS. 1 and 2. FIG. 1 is a schematic front diagram showingthe forming apparatus 1 according to an embodiment. FIG. 2 is aperspective diagram showing the discharged appearance of an aerosol (S)and a gas (G) by a first dispenser 36 and a second dispenser 44according to an embodiment.

[Configuration]

The forming apparatus 1 can produce a three-dimensional formed body(formed body) made of an inorganic material. Herein, the ‘inorganicmaterial’ refers to any material other than an organic material, andcontains a compound consisting of a metal group, an alloy, a metalelement, and a nonmetal element (for example, metal oxide, metalnitride, metal salt, or the like), a compound consisting of a nonmetalelement (for example, boron nitride or the like), or the like. However,the three-dimensional formed body produced by the forming apparatus 1can further contain an organic material. Further, the forming apparatus1 can also be used to produce the three-dimensional formed bodyconsisting only of the organic material.

As shown in FIG. 1, the forming apparatus 1 includes a stage 10, achamber 12, a discharge apparatus 14, a monitoring unit 16, a cleaningunit 18, and a control unit 20 (see FIG. 9).

As shown in FIG. 2, the stage 10 is a flat plate disposed along ahorizontal surface (that is, parallel to the xy plane). The thicknessdirection of the stage 10 is substantially parallel to the z direction.The stage 10 is movable at least in the z direction by a stage movingmechanism 22 (see FIG. 1). The stage moving mechanism 22 is, forexample, a rack and pinion type actuator driven by a motor (not shown).However, the stage 10 can be disposed in parallel with anotherdirection, such as a perpendicular direction.

The stage 10 has a fixed surface 10 a for fixing a particle (P). Asdescribed above, the fixed surface 10 a can be the upper surface of thestage 10 itself, the upper surface of a substrate supported by the stage10, and the surface of the particle (P) already fixed to the stage 10 orthe substrate. A material of the substrate is not particularly limited,and can be an inorganic material, an organic material, and a hybridmaterial thereof.

As shown in FIG. 1, the chamber 12 accommodates the stage 10, a firstdispenser 36 and a second dispenser 44 of a discharge apparatus 14, anda cleaning unit 18 to be described later. The inner space of the chamber12 is separated from the outer space of the chamber 12. The inner spaceof the chamber 12 can be depressurized by a vacuum pump 24 connected tothe chamber 12. It is possible to evacuate the inner space of thechamber 12 to perform a forming work in a negative pressure atmosphere,thereby suppressing a mixing of impurities and the like. Further, theinner space of the chamber 12 can be filled with an inert gas such asnitrogen gas or argon gas.

The discharge apparatus 14 includes a first discharge apparatus 14 a forgenerating and discharging an aerosol (S), and a second dischargeapparatus 14 b for generating and discharging a gas (G). The firstdischarge apparatus 14 a includes a first gas cylinder 30, a first flowrate regulator 32, an aerosol generator 34, a second flow rate regulator35, the first dispenser 36, and the first dispenser moving mechanism 38.The second discharge apparatus 14 b includes a second gas cylinder 40, athird flow rate regulator 42, a second dispenser 44, and a seconddispenser moving mechanism 46. The discharge apparatus 14 furtherincludes a discharge control unit 48 (see FIG. 9) for controlling thefirst discharge apparatus 14 a and the second discharge apparatus 14 b.

The first discharge apparatus 14 a generates the aerosol (S) todischarge it toward the stage 10. The first gas cylinder 30 of the firstdischarge apparatus 14 a accommodates the gas for generating the aerosol(S). The gas can be any gas such as air, oxygen gas, hydrogen gas, ororganic gas, other than an inert gas such as helium gas, nitrogen gas,or argon gas. The gas in the first gas cylinder 30 is sent to theaerosol generator 34 at a flow rate regulated by the first flow rateregulator 32.

The first flow rate regulator 32 can use any one such as a mass flowcontroller or a simple pressure regulating valve as long as it canregulate the flow rate of the gas from the first gas cylinder 30. Thefirst flow rate regulator 32 is controlled by the discharge control unit48 (see FIG. 9).

The aerosol generator 34 accommodates the particle (P) for the aerosol(S). The aerosol generator 34 receives the gas from the first gascylinder 30. The gas is mixed with the particle (P) inside the aerosolgenerator 34 to form the aerosol in which the particle (P) has beendispersed in the high pressure gas. The formed aerosol is sent from theaerosol generator 34 to the first dispenser 36 through the second flowrate regulator 35 as the aerosol (S). Details of the particle (P) willbe described later.

Further, a configuration of the aerosol generator 34 is not limited tothe above example. For example, the aerosol can be generated by sprayinga dispersion of the particle (P) into the gas to dry it, and thespraying of the dispersion can use electrostatic spraying, sonicspraying, inkjet technology, or the like, other than pressure spraying.Further, any aerosol generator can be used as long as the aerosol inwhich the particle (P) has been dispersed in the gas is formed.

The second flow rate regulator 35 regulates the flow rate of the aerosol(S) supplied from the aerosol generator 34 to the first dispenser 36. Aswith the first flow rate regulator 32, the second flow rate regulator 35can use any one as long as it can regulate the flow rate of the gas. Thesecond flow rate regulator 35 is controlled by the discharge controlunit 48 (see FIG. 9). Further, the second flow rate regulator 35 can beinstalled as a component of the aerosol generator 34. Alternatively, thesecond flow rate regulator 35 can be omitted, and the first flow rateregulator 32 can collectively control including the flow rate of theaerosol (S) supplied to the first dispenser 36.

The first dispenser 36 is in the form of a tapered nozzle having anopening at the tip. The first dispenser 36 is spaced apart from thestage 10 to be disposed above the stage 10. However, the arrangement ofthe first dispenser 36 is not limited to the above example, and thefirst dispenser 36 can be disposed below or at the side of the stage 10.The first dispenser 36 is movable in at least one direction of the xdirection, the y direction, and the z direction by the first dispensermoving mechanism 38. Further, the first dispenser 36, for example, canbe rotated around the z axis by the first dispenser moving mechanism 38,and can also be rotated in the plane parallel to the z axis by the firstdispenser moving mechanism 38. The first dispenser moving mechanism 38is, for example, an articulated arm driven by a motor (not shown).

The first dispenser 36 discharges the aerosol (S) sent from the aerosolgenerator 34 from the opening at the tip toward the stage 10 at a firstdischarge rate (V1). The first dispenser 36 can discharge the aerosol(S) intermittently or continuously. The discharge rate of the aerosol(S) by the first dispenser 36 can be appropriately regulated by thesecond flow rate regulator 35. However, the regulation of the dischargerate can be performed by regulating the pressure difference between thechamber 12 and the aerosol generator 34, or by switching the diameter orshape of a nozzle of the first dispenser 36 with a drive mechanism notshown, and these methods can be used together with the second flow rateregulator 35. Further, the discharge rate of the aerosol (S) can bedetected by, for example, a rate detector (not shown) installed betweenthe first dispenser 36 and the stage 10 in the chamber 12.

Further, the first discharge apparatus 14 a can include a crusher fordispersing the aggregated particle (P) in the aerosol (S), a filter, aclassifier, or the like for separating the particle (P) exceeding apredetermined size.

The second discharge apparatus 14 b generates the gas (G) to dischargeit toward the stage 10. The second gas cylinder 40 of the seconddischarge apparatus 14 b accommodates the gas for the gas (G). The gascan be any gas such as air, oxygen gas, hydrogen gas, or organic gas,other than an inert gas such as helium gas, nitrogen gas, or argon gas,as with the gas accommodated in the first gas cylinder 30. The gas inthe second gas cylinder 40 is sent to the second dispenser 44 at a flowrate regulated by the third flow rate regulator 42.

As with the first flow rate regulator 32, the third flow rate regulator42 can use any one as long as it can regulate the flow rate of the gasfrom the second gas cylinder 40. The third flow rate regulator 42 iscontrolled by the discharge control unit 48 (see FIG. 9).

The second dispenser 44 is in the form of a tapered nozzle having anopening at the tip. The second dispenser 44 is disposed at the same sideas the first dispenser 36 with respect to the stage 10. For example, thesecond dispenser 44 is disposed in parallel with the first dispenser 36.As with the first dispenser 36, the second dispenser 44 is movable in atleast one direction of the x direction, the y direction, and the zdirection by the second dispenser moving mechanism 46. Further, thesecond dispenser 44, for example, can be rotated around the z axis bythe second dispenser moving mechanism 46, and can also be rotated in theplane parallel to the z axis by the second dispenser moving mechanism46. The second dispenser moving mechanism 46 is, for example, anarticulated arm driven by a motor (not shown).

The second dispenser 44 discharges the gas (G) sent from the second gascylinder 40 from the opening at the tip toward the stage 10 at a seconddischarge rate (V2). The second dispenser 44 can discharge the gas (G)intermittently or continuously. The discharge rate of the gas (G) by thesecond dispenser 44 can be appropriately regulated by the third flowrate regulator 42 as with the aerosol (S). Further, as described above,the discharge rate can be regulated by changing the pressure difference,the nozzle diameter, or the like. Further, as with the aerosol (S), thedischarge rate of the gas (G) can also be detected by a rate detector(not shown) installed in the chamber 12, for example.

The second discharge rate (V2) is faster than the first discharge rate(V1) at which the aerosol (S) is discharged from the first dispenser 36.The second dispenser 44 discharges the gas (G) toward the stage 10 sothat the gas (G) at least partially overlaps the aerosol (S) dischargedfrom the first dispenser 36. Details of the discharge of the aerosol (S)and the gas (G) will be described later.

The monitoring unit 16 monitors the appearance of the particle (P) onthe stage 10. The monitoring unit 16 includes, for example, an imagingcamera spaced apart from the stage 10 to be disposed above the stage 10.This imaging camera captures the appearance of the surface of the stage10, and the monitoring unit 16 detects the position or shape of theparticle (P) on the stage 10 based on the captured image (this detectionwork can be performed by the control unit 20 to be described later).Further, the component of the monitoring unit 16 is not limited to theimaging camera, and can be a radiation analysis apparatus (for example,X-ray diffraction apparatus) or an ultrasonic analysis apparatus, or thelike, which observes the appearance of the stage surface by irradiatingradiation or ultrasonic waves on the stage 10, and these can be usedtogether.

The cleaning unit 18 includes an air supply apparatus 50 and a recoveryapparatus 52. The cleaning unit 18 can remove the particle (P), otherimpurities, or the like remaining on the stage 10 without being fixed tothe stage 10.

The air supply apparatus 50 blows out airflow to the stage 10 to blowoff the particle (P) which has not been fixed to the stage 10, or thelike. The air supply apparatus 50 can be any configuration as long as itgenerates the airflow. For example, the air supply apparatus 50 can beone that sprays the gas received from a gas supply source (not shown)from the nozzle, and can be one that generates the airflow by rotating afan like an electric fan. The air supply apparatus 50 is movable by atleast one direction of at least of the x direction, the y direction, andthe z direction by the air supply apparatus moving mechanism 54.Further, the air supply apparatus 50, for example, can be rotated aroundthe z axis by the air supply apparatus moving mechanism 54, and can alsobe rotated in the plane parallel to the z axis by the air supplyapparatus moving mechanism 54. The air supply apparatus moving mechanism54 is, for example, an articulated arm driven by a motor (not shown).However, the air supply apparatus 50 can be fixed. In this case, the airsupply apparatus moving mechanism 54 is omitted.

The recovery apparatus 52 sucks and recovers the particle (P) blown offby the air supply apparatus 50. The recovery apparatus 52 can be anyconfiguration as long as it has a suction function. However, therecovery apparatus 52 does not necessarily have the suction function,and can be only a member which has an opening for recovering theparticle (P) blown off by the air supply apparatus 50. Further, the airsupply apparatus 50 can be omitted and removal of the particle (P) whichhas not been fixed can be performed only by the suction of the recoveryapparatus 52. As with the air supply apparatus 50, the recoveryapparatus 52 is movable by at least one direction of at least of the xdirection, the y direction, and the z direction by the recoveryapparatus moving mechanism 56. Further, the recovery apparatus 52, forexample, can be rotated around the z axis by the recovery apparatusmoving mechanism 56, and can also be rotated in the plane parallel tothe z axis by the recovery apparatus moving mechanism 56. The recoveryapparatus moving mechanism 56 is, for example, an articulated arm drivenby a motor (not shown). However, the recovery apparatus 52 can be fixed.In this case, the recovery apparatus moving mechanism 56 is omitted.

If it has been determined that the particle (P) which has not been fixedto the stage 10 remains from the information acquired by the monitoringunit 16 after cleaning the stage 10, the cleaning unit 18 can clean thestage 10 by the air supply apparatus 50 and the recovery apparatus 52again. Alternatively, the cleaning unit 18 can be configured toperiodically clean the stage 10.

The recovery apparatus 52 can return the recovered particle (P) to theaerosol generator 34 again. Therefore, the particle (P) which has notbeen fixed to the stage 10 can be reused as a raw material of theaerosol (S).

The control unit 20 receives input data such as three-dimensional shapedata of the formed body to be produced to control each component of theforming apparatus 1. The control unit 20 is realized by a processor suchas a Central Processing Unit (CPU) or a Graphics Processing Unit (GPU),for example. An operation of the control unit 20 will be described laterwith reference to FIGS. 9 and 10.

[Aerosol Material]

The aerosol (S) discharged from the first dispenser 36 is formed of anaerosol in which the particle (P) has been dispersed in the gas suppliedfrom the first gas cylinder 30.

The particle (P) is a particle consisting of any inorganic material suchas metal, oxide, nitride, oxynitride, carbide, hydroxide, carbonate, orphosphate, any organic material, or a combination thereof. A material ofthe particle (P) is not particularly limited thereto.

Examples of the metal can be aluminum, titanium, iron, copper, stainlesssteel, nickel chromium steel, and the like.

Examples of the oxide can be silicon dioxide, aluminum oxide, magnesiumoxide, titanium oxide, iron oxide, zinc oxide, yttrium oxide, zirconiumoxide, barium titanate, lead zirconate titanate, and the like.

Examples of the nitride can be silicon nitride, aluminum nitride,titanium nitride, iron nitride, and the like.

Examples of the oxynitride can be silicon oxynitride, aluminumoxynitride, and the like.

Examples of the carbide can be silicon carbide, titanium carbide, boroncarbide, zirconium carbide, and the like.

Examples of the hydroxide can be magnesium hydroxide, iron hydroxide,apatite hydroxide, and the like.

Examples of the carbonate can be calcium carbonate, sodium carbonate,potassium carbonate, lithium carbonate, and the like.

Examples of the phosphate can be iron phosphate, manganese phosphate,calcium phosphate, and the like.

Examples of the organic material can be hydrocarbon such as polyethyleneor polyethylene terephthalate (PET), engineer plastic such aspolystyrene or polyimide, fluorine-based polymer such aspolytetrafluoroethylene (PTFE) or polyvinylidene fluoride (PVdF),biopolymer such as proteins or fats, and the like.

[Operation of the Discharge Apparatus]

An operation of the discharge apparatus 14 in an embodiment will bedescribed with reference to FIGS. 2 to 5.

FIG. 2 is a perspective diagram showing the discharged appearance of theaerosol (S) and the gas (G) by the first dispenser 36 and the seconddispenser 44 according to an embodiment.

As shown in FIG. 2, the gas (G) is discharged from the second dispenser44 at the second discharge rate (V2) faster than the first dischargerate (V1) at which the aerosol (S) is discharged so as to at leastpartially overlap the aerosol (S) discharged from the first dispenser36. Therefore, a portion which has overlapped the gas (G) among theaerosol (S) is accelerated toward the stage 10 by the gas (G) comparedto the other portions of the aerosol (S). As a result, the aerosol (S)accelerated by the gas (G) collides in a first portion 61 which is aportion where a discharge region (R1) of the first dispenser 36 and adischarge region (R2) of the second dispenser 44 overlap. The aerosol(S) which is not accelerated by the gas (G) collides in a second portion62 which is a portion where the discharge region (R1) of the firstdispenser 36 and the discharge region (R2) of the second dispenser 44 donot overlap. The aerosol (S) does not substantially collide in a thirdportion 63 which is a portion of not overlapping the discharge region(R1) of the first dispenser 36 among the discharge region (R2) of thesecond dispenser 44. Here, the ‘discharge region’ virtually means aregion where most of the particles (P) among the aerosol (S) (forexample, 95%) land if the aerosol (S) has been discharged from the firstdispenser 36 or the second dispenser 44 toward the stage 10.

The first discharge rate (V1) can be set to a rate at which the particle(P) is not substantially fixed to the stage if the aerosol (S)containing the particle (P) has been discharged from the first dispenser36 toward the stage 10 at the first discharge rate (V1). Meanwhile, thesecond discharge rate (V2) can be set to a rate at which the particle(P) is substantially fixed to the stage 10 if the aerosol (S) containingthe particle (P) has been discharged from the first dispenser 36 towardthe stage 10 at the second discharge rate (V2). That is, if the aerosol(S) has been discharged at a discharge rate of any threshold (referredto as ‘critical rate’ in the present specification) or more, theparticle (P) among the aerosol (S) is substantially fixed to the stage10, the first discharge rate (V1) is smaller than the critical rate, andthe second discharge rate (V2) is the critical rate or more. Here, thecritical rate depends on the kind or size of the particle (P), amaterial of the stage 10 or the substrate, and the like. For example, ifthe particle (P) of α-Al₂O₃ having an average particle diameter of about0.4 μm is contained, and the particle (P) has been fixed to thesubstrate of copper spaced by 5 cm apart from the first dispenser 36having a nozzle diameter of 3 mm by using the aerosol (S) using anitrogen gas as a carrier gas, the critical rate is about 150 m/s. Inthis case, the first discharge rate (V1) is, for example, 20 m/s to 100m/s, and preferably, 50 m/s to 80 m/s, and the second discharge rate(V2) is, for example, 200 m/s to 1000 m/s, and preferably, 400 m/s to800 m/s. For example, the first discharge rate (V1) is 60 m/s, and thesecond discharge rate (V2) is 500 m/s.

As described above, it is possible to set the first discharge rate (V1)and the second discharge rate (V2), thereby substantially fixing onlythe particle (P) contained in the portion which has overlapped the gas(G) among the discharged aerosol (S) to the stage 10. This will befurther described with reference to FIGS. 3 to 5.

FIGS. 3A-D are diagrams virtually showing the operation of the formingapparatus 1 according to an embodiment if the aerosol (S) has beendischarged from the first dispenser 36 at the first discharge rate (V1)without using the second dispenser 44.

In FIG. 3A, the aerosol (S) is discharged from the first dispenser 36toward the fixed surface 10 a on the stage 10 at the first dischargerate (V1). The aerosol (S) is discharged with a constant spread from thetip of the first dispenser 36. The closer to the center axis 36 a of thefirst dispenser 36, the larger the concentration of the aerosol (S)(furthermore, the concentration of the particle (P)), and the denser theparticle (P) is.

In FIG. 3B, the particle (P) among the discharged aerosol (S) lands onthe fixed surface 10 a. As described above, since the particle (P) amongthe aerosol (S) discharged at the first discharge rate (V1) is notsubstantially fixed to the fixed surface 10 a, the entire particle (P)on the fixed surface 10 a becomes a non-fixed particle (NP) which hasnot been fixed to the fixed surface 10 a.

In FIG. 3C, the non-fixed particle (NP) on the fixed surface 10 a isblown off by the airflow from the air supply apparatus 50 to berecovered by the recovery apparatus 52. Therefore, the entire particle(P) is substantially removed from the fixed surface 10 a.

FIG. 3D is a plane diagram of the stage 10 viewed from the top after theoperation of the air supply apparatus 50. Since the entire particle (P)is substantially removed, no particle (P) substantially remains even inany one of the discharge region (R1) of the first dispenser 36 and thedischarge region (R2) of the second dispenser 44.

FIGS. 4A-D are diagrams virtually showing the operation of the formingapparatus 1 according to an embodiment if the aerosol (S) has beendischarged from the first dispenser 36 at the second discharge rate (V2)without using the second dispenser 44. Further, in an embodimentdescribed in the present specification, the first dispenser 36discharges the aerosol (S) at the first discharge rate (V1) rather thanthe second discharge rate (V2) in the case of using the second dispenser44 together.

In FIG. 4A, the aerosol (S) is discharged from the first dispenser 36toward the fixed surface 10 a on the stage 10 at the second dischargerate (V2).

In FIG. 4B, the particle (P) among the discharged aerosol (S) lands onthe fixed surface 10 a. As described above, since the particle (P) amongthe aerosol (S) discharged at the second discharge rate (V2) issubstantially fixed to the fixed surface 10 a, the entire particle (P)on the fixed surface 10 a becomes a fixed particle (FP) fixed to thefixed surface 10 a.

In FIG. 4C, the airflow is blown out from the air supply apparatus 50 tothe fixed surface 10 a, and since the entire particle (P) on the fixedsurface 10 a has been substantially fixed to the fixed surface 10 a, itis not removed from the fixed surface 10 a.

FIG. 4D is a plane diagram of the stage 10 viewed from the top after theoperation of the air supply apparatus 50. Since the entire particle (P)is not substantially removed from the fixed surface 10 a, the fixedparticle (FP) remains over the entire discharge region (R1) of the firstdispenser 36.

FIGS. 5A-D are diagrams showing the operation of the forming apparatus 1according to an embodiment if the aerosol (S) has been discharged fromthe first dispenser 36 at the first discharge rate (V1) and the gas (G)has been discharged from the second dispenser 44 at the second dischargerate (V2). This corresponds to an example of the actual operation of anembodiment described in the present specification.

In FIG. 5A, the aerosol (S) is discharged from the first dispenser 36toward the fixed surface 10 a on the stage 10 at the first dischargerate (V1), and the gas (G) is discharged from the second dispenser 44toward the fixed surface 10 a at the second discharge rate (V2). Here,the aerosol (S) is accelerated toward the stage 10 by the stronger gas(G) in the region where the aerosol (S) and the gas (G) overlap.

In FIG. 5B, the particle (P) among the discharged aerosol (S) lands onthe fixed surface 10 a. As described above, the gas (G) is discharged atthe second discharge rate (V2), such that if the portion of overlappingthe gas (G) among the discharged aerosol (S) is sufficiently acceleratedby the gas (G), the particle (P) contained in the portion collides withthe fixed surface 10 a to be substantially fixed to the fixed surface 10a. For this reason, in the first portion 61 (see FIG. 2) which is theportion where the discharge region (R1) of the first dispenser 36 andthe discharge region (R2) of the second dispenser 44 overlap, the entireparticle (P) on the fixed surface 10 a is the fixed particle (FP) fixedto the fixed surface 10 a.

Meanwhile, since the aerosol (S) is discharged at the first dischargerate (V1), the particle (P) contained in the portion of not overlappingthe gas (G) among the discharged aerosol (S) is not substantially fixedto the fixed surface 10 a even when it collides with the fixed surface10 a. For this reason, in the second portion 62 (see FIG. 2) which isthe portion of not overlapping the discharge region (R2) of the seconddispenser 44 among the discharge regions (R1) of the first dispenser 36,the entire particle (P) on the fixed surface 10 a is the non-fixedparticle (NP) which has not been fixed to the fixed surface 10 a.

In FIG. 5C, the non-fixed particle (NP) on the fixed surface 10 a isblown off by the airflow from the air supply apparatus 50 to berecovered by the recovery apparatus 52. Meanwhile, the fixed particle(FP) which is present in the first portion 61 is not blown off by theair supply apparatus 50 and remains on the fixed surface 10 a.

FIG. 5D is a plane diagram of the stage 10 viewed from the top after theoperation of the air supply apparatus 50. As a result, the fixedparticle (FP) substantially remains only in the first portion 61, andneither the fixed particle (FP) nor non-fixed particle (NP)substantially remain in the other portions. Even if some of theparticles (P) have been accidentally fixed to the second portion 62, arate of the first portion 61 covered with the fixed particle (FP) ismuch larger than that of the second portion 62. That is, the coverage ofthe first portion 61 defined by a ratio of the area where the fixedparticle (FP) covers the first portion 61 and the entire area of thefirst portion 61 is much larger than the coverage of the second portion62 defined by a ratio of the area where the fixed particle (FP) coversthe second portion 62 and the entire area of the second portion 62.

Further, although more fixed particles (FP) are fixed to the firstportion 61 in FIG. 5D compared to FIG. 4D, this is realized bydischarging the aerosol (S) and the gas (G) in the case shown in FIG. 5over a longer time than the case shown in FIG. 4, for example. Unlikethe case shown in FIG. 4, since the non-fixed particle (NP) of thesecond portion 62 can be removed by the recovery apparatus 52 in thecase shown in FIG. 5, the non-fixed particle (NP) can be removed byperforming the discharge operation over a longer time than in FIG. 4,thereby intensively fixing the particle (P) which is equal to or morethan that of the center portion of the discharge region (R1) of thefirst dispenser 36 in FIG. 4D to the first portion 61.

Further, since the aerosol (S) is not originally supplied to the thirdportion 63 which is the portion of not overlapping the discharge region(R1) of the first dispenser 36 among the discharge region (R2) of thesecond dispenser 44, the particle (P) does not substantially remain inthe third portion 63 after the discharge operation.

As described above, it is possible to set the first discharge rate (V1)to be smaller than the critical rate and to also set the seconddischarge rate (V2) to be the critical rate or more to accelerate onlythe portion of overlapping the gas (G) among the aerosol (S) to thecritical rate or more, thereby fixing only the particle (P) contained inthe portion to the fixed surface 10 a.

Further, it is possible to appropriately regulate the arrangement of thefirst dispenser 36 and the second dispenser 44 by the first dispensermoving mechanism 38 and the second dispenser moving mechanism 46,thereby regulating the position, size, or shape of the first portion 61on the stage 10 as necessary.

For example, as shown in FIG. 6, if the second dispenser 44 is moved inthe x direction by the second dispenser moving mechanism 46 so that thesecond dispenser 44 is close to the first dispenser 36, the firstportion 61, which is the portion where the discharge region (R1) of thefirst dispenser 36 and the discharge region (R2) of the second dispenser44 overlap, becomes large, thereby fixing the particle (P) over a largerarea at one time. On the contrary, in the case of making the area whichfixes the particle (P) small, the second dispenser 44 can be moved bythe second dispenser moving mechanism 46 so that the second dispenser 44is away from the first dispenser 36.

Further, for example, as shown in FIG. 7, if the second dispenser 44 ismoved in the z direction (for example, upward) by the second dispensermoving mechanism 46 so that the second dispenser 44 is away from thestage 10, the discharge region (R2) of the second dispenser 44 becomeslarge to also increase the first portion 61, thereby fixing the particle(P) over a larger area at one time. On the contrary, if the seconddispenser 44 is moved in the z direction (for example, downward) by thesecond dispenser moving mechanism 46 so that the second dispenser 44 isclose to the stage 10, the discharge region (R2) of the second dispenser44 can become small, thereby fixing the particle (P) to a smallerregion.

Further, as shown in FIG. 8, even in the case of having rotated thesecond dispenser 44 around the y axis by the second dispenser movingmechanism 46 so that the direction in which the second dispenser 44discharges the gas (G) is inclined with respect to the normal directionof the stage 10, the first portion 61 can be made larger or smaller,thereby changing the area where the particle (P) is fixed.

[System Configuration]

Next, a system configuration of the forming apparatus 1 will bedescribed with reference to FIG. 9.

FIG. 9 is a block diagram showing an example of a system configurationof the forming apparatus 1 according to an embodiment.

An input unit 70 receives the input data of the formed body to beproduced (for example, three-dimensional structural data of the formedbody), and also transmits the input data to the control unit 20.

The monitoring unit 16 acquires monitoring data of the particle (P) onthe stage 10, and also transmits the monitoring data to the control unit20. The monitoring data includes the position, shape, or the like of thefixed particle (FP) or the non-fixed particle (NP) of the stage 10.

The control unit 20 controls the stage moving mechanism 22 so that thestage 10 moves to an appropriate position, based on the input datareceived from the input unit 70, the monitoring data acquired from themonitoring unit 16, and the like, and also controls the air supplyapparatus moving mechanism 54 and the recovery apparatus movingmechanism 56, respectively, so that the air supply apparatus 50 and therecovery apparatus 52 are appropriately disposed. Further, the controlunit 20 controls a vacuum pump 24 to start, regulate, or stop thevacuuming of the inner space of the chamber 12 according to a user'sinput or the like.

The control unit 20 includes a discharge control unit 48 for controllingthe discharge apparatus 14. The discharge control unit 48 controls thefirst discharge apparatus 14 a and the second discharge apparatus 14 b,respectively, based on the input data, the monitoring data, and thelike. Specifically, the discharge control unit 48 controls the firstflow rate regulator 32, the aerosol generator 34, and the second flowrate regulator 35 to supply the aerosol (S) to the first dispenser 36 atan appropriate amount or concentration, or an appropriate timing, andalso controls the first dispenser 36 to discharge the aerosol (S) at anappropriate rate or at an appropriate timing. Further, the dischargecontrol unit 48 controls the third flow rate regulator 42 to supply thegas (G) to the second dispenser 44 at an appropriate amount or at anappropriate timing, and also controls the second dispenser 44 todischarge the gas (G) at an appropriate rate or at an appropriatetiming. Further, the discharge control unit 48 controls the firstdispenser moving mechanism 38 and the second dispenser moving mechanism46, respectively, so that the first dispenser 36 and the seconddispenser 44 are appropriately disposed.

[Method of Producing the Formed Body]

Next, a method of producing the formed body by the forming apparatus 1will be described with reference to FIG. 10.

FIG. 10 is a flowchart showing an example of a method of producing theformed body by the forming apparatus 1 according to an embodiment.

If the formation of a first layer is started on the stage (S100), first,the control unit 20 determines a fixing scheduled position(corresponding to the first portion 61) which fixes the particle (P) onthe stage 10, and also determines two discharge regions (correspondingto the discharge region (R1) of the first dispenser 36 and the dischargeregion (R2) of the second dispenser 44) to which the aerosol (S) and thegas (G) are discharged, respectively, in order to fix the particle (P)to the fixing scheduled position, based on the input data (S102).

Next, the control unit 20 instructs the first dispenser moving mechanism38, the second dispenser moving mechanism 46, the air supply apparatusmoving mechanism 54, and the recovery apparatus moving mechanism 56,respectively, to move the first dispenser 36, the second dispenser 44,the air supply apparatus 50, and the recovery apparatus 52 to changetheir positions or angles as necessary, based on the determined fixingscheduled position and each discharge region (S104).

Next, the control unit 20 instructs the first dispenser 36 to dischargethe aerosol (S) toward the discharge region of the first dispenser 36,and also instructs the second dispenser 44 to discharge the gas (G)toward the discharge region of the second dispenser 44 (S106). Here, thecontrol unit 20 instructs the second flow rate controller 35 based on apredetermined critical rate to regulate the flow rate of the aerosol (S)supplied to the first dispenser 36 so that the discharge rate of thefirst dispenser 36 is the first discharge rat (V1) which is smaller thanthe critical rate, and also instructs the third flow rate regulator 42to regulate the flow rate of the gas (G) supplied to the seconddispenser 44 so that the discharge rate of the second dispenser 44 isthe second discharge rate (V2) which is the critical rate or more. Asdescribed above, the portion of overlapping the gas (G) among thedischarged aerosol (S) is accelerated by the gas (G) to fix only theparticle (P) contained in this portion to the stage 10. Further, thedischarge timing of the first dispenser 36 and the discharge timing ofthe second dispenser 44 can be simultaneous, and can also have a timedifference.

Next, the control unit 20 instructs the air supply apparatus 50 to blowout the airflow to the stage 10 to blow off the non-fixed particle (NP)from the stage 10 (S108). Further, the control unit 20 instructs therecovery apparatus 52 to recover the non-fixed particle (NP) blown offby the air supply apparatus 50 (S110). Further, the control unit 20 caninstruct the air supply apparatus moving mechanism 54 and the recoveryapparatus moving mechanism 56 so as to move the air supply apparatus 50and the recovery apparatus 52 at this timing.

Next, the control unit 20 instructs the monitoring unit 16 to acquirethe information of the fixed particle (FP) fixed to the stage 10 (S112).For example, the control unit 20 instructs the monitoring unit 16 tocapture the image of the stage 10 viewed from the top with the imagingcamera. The control unit 20 confirms the position or shape of the fixedparticle (FP) on the stage 10, based on the image acquired by themonitoring unit 16 or the like. For example, the control unit 20determines whether the fixed particle (FP) has been appropriately fixedto the fixing scheduled position, whether the fixed particle (FP) hasnot been fixed at a position other than the fixing scheduled position,whether the amount of the fixed particle (FP) fixed to the fixingscheduled position is appropriate, whether crack or the like has notoccurred in the fixed particle (FP), or the like.

Next, the control unit 20 determines whether the formation of the firstlayer has been completed in view of the input data (S114). For example,the control unit 20 determines whether the fixing operation has not yetbeen performed among the fixing scheduled positions of the first layerin the input data with reference to the operation history so far, and ifit has been determined that the fixing scheduled position where thefixing operation has not yet been performed is present, the control unit20 determines that the formation of the first layer has not beencompleted. If it has been determined that the fixing operation wasperformed for the entire fixing scheduled position of the first layer,the control unit 20 determines that the formation of the first layer hasbeen completed. Alternatively, the control unit 20 can compare andcontrast the input data with the actual appearance on the stage 10acquired by the monitoring unit 16 to calculate the degree of matchingbetween the entire position where the fixing of the particle (P) shouldbe performed in the first layer in the input data and the entireposition where the particle (P) has been actually fixed on the stage 10.In this case, if it has been determined that the fixing scheduledposition in the input data and the actual fixed position obtained by themonitoring unit 16 match sufficiently, the control unit 20 determinesthat the formation of the first layer has been completed.

If it has been determined that the formation of the first layer has notbeen completed (S114: NO), the control unit 20 returns to the S102 todetermine the next fixing scheduled position and discharge region, basedon the determination result. For example, if it has been determined thatthe fixed particle (FP) has been appropriately fixed to the fixingscheduled position, the control unit 20 determines the next fixingscheduled position and discharge region in the first layer in view ofthe input data. For example, if it has been determined that the amountof the fixed particle (FP) fixed to the fixing scheduled position isinsufficient, the control unit 20 does not change the fixing scheduledposition or slightly changes it to instruct the first dispenser 36 andthe second dispenser 44 to perform the discharge again.

Here, the next fixing scheduled position is determined by any method.For example, the next fixing scheduled position is determined accordingto an order such as first moving from one end of the stage 10 to theother end thereof along the x direction, then moving slightly in the ydirection, moving from one end of the stage 10 to the other end thereofalong the x direction again, moving slightly in the y direction again,and the like, and can be determined based on the distance from the fixedposition just before (for example, so that the fixing scheduled positionclosest to the fixed position just before is set to the next fixingscheduled position).

Further, the forming apparatus 1 can include a fixed particle removalmeans (not shown) for removing the particle (P) from the stage 10 if theparticle (P) has been fixed to a position different from the fixingscheduled position in the input data. The fixed particle removing meansis, for example, a cutting apparatus capable of position control whichphysically shaves off the particle (P) fixed to the stage 10.

Meanwhile, if it has been determined that the formation of the firstlayer has been completed (S114: YES), the control unit 20 instructs thefirst dispenser 36 and the second dispenser 44 to stop the discharge ofthe aerosol (S) and the gas (G) (S116).

Next, the control unit 20 determines whether the formation of the entireformed body has been completed in view of the input data (S118). Forexample, the control unit 20 determines whether the fixing operation hasnot yet been performed among the entire fixing scheduled positions ofeach layer in the input data with reference to the operation history sofar, and if it has been determined that the fixing scheduled positionwhere the fixing operation has not yet been performed is present, thecontrol unit 20 determines that the formation of the entire formed bodyhas not been completed. If it has been determined that the formation ofthe formed body has not been completed (S118: NO), the control unit 20instructs the stage moving mechanism 22 to move the stage 10 in the zdirection (for example, so as to lower it by one layer in the zdirection) (S120). Thereafter, the flow returns to the S100 to start theformation of a second layer.

Meanwhile, if it has been determined that the formation of the entireformed body was completed (S118: YES), the formed body is completelyproduced. The formation from the first layer to the final layer iscompleted, thereby obtaining the formed body having anythree-dimensional shape.

Effects

According to the forming apparatus 1 described above, only some smallregions among the distribution of the aerosol discharged from thedispenser can be fixed to the stage. Therefore, it is possible to fixthe particle in a much smaller region than the case where the particleis fixed by simply spraying the aerosol with the dispenser at high rate.That is, it is possible to improve the resolution and selectivity of thefixing position of the particle, and furthermore, the positioncontrollability. It is possible to repeat the particle fixing to such asmall region, thereby performing precise shaping of thethree-dimensional formed body without requiring the use of the binder orthe heat treatment.

Since no binder is used, the photocuring process or the degreasingprocess of the binder is unnecessary. Further, since the fixing at roomtemperature is possible, the sintering process is also unnecessary, andit is possible to suppress deterioration or damage of the material dueto the heating. Further, since the heating process such as thedegreasing process or the sintering process is unnecessary, the entireprocess of the forming work can be performed at room temperature,thereby not requiring a heating apparatus or the like. For this reason,the work can be remarkably easy and can also become low cost.

According to the present embodiment, the discharge apparatus 14 of theforming apparatus 1 further includes the first dispenser movingmechanism 38 for changing at least one side of the position anddirection of the first dispenser 36, and the second dispenser movingmechanism 46 for changing at least one side of the position anddirection of the second dispenser 44, and the first dispenser movingmechanism 38 and the second dispenser moving mechanism 46 can change atleast one side of the distance between the first dispenser 36 and thesecond dispenser 44 and the angle between the direction in which thefirst dispenser 36 discharges the aerosol (S) and the direction in whichthe second dispenser 44 discharges the gas (G). According to such aconfiguration, the size or shape of the region (that is, the firstportion 61) to which the particle (P) is fixed can be changed asnecessary. Therefore, it is possible to improve the selectivity of thefixed position of the particle (P), and furthermore, to improve thefreedom degree of the three-dimensional shaping by the forming apparatus1.

According to the present embodiment, the forming apparatus 1 furtherincludes the monitoring unit 16 for monitoring the particle (P) on thefixed surface 10 a, and the control unit 20 determines at least one sideof the region (R1) on the fixed surface 10 a where the aerosol (S) isdischarged and the region (R2) on the fixed surface 10 a where the gas(G) is discharged, based on the information from the monitoring unit 16.According to such a configuration, since the next fixing scheduledposition can be determined based on the position or shape of theparticle (P) actually fixed to the stage 10, more precise shaping ispossible. Further, since some degree of randomness is present in thedistribution of the discharged aerosol (S), such randomness can becompensated by the above-described feedback control.

According to the present embodiment, the forming apparatus 1 furtherincludes the cleaning unit 18 for removing the particle (P) which hasnot been fixed from the fixed surface 10 a, and the cleaning unit 18 hasthe air supply apparatus 50 for blowing off the particle (P) which hasnot been fixed from the fixed surface 10 a and the recovery apparatus 52for recovering the particle (P) which has not been fixed from the fixedsurface 10 a. According to such a configuration, not only the non-fixedparticle (NP) can be removed but also can be reused as a raw material ofthe aerosol (S) discharged after that, thereby reducing the cost of theforming work.

Modified Example

The above example forms the formed body by repeatedly using the aerosol(S) and the gas (G) together to fix the particle (P) to a small spot,but if it is necessary to fix the particle (P) to certain degree of alarge area or the entire layer during the forming process, it is alsopossible to stop the supply of the gas (G) from the second dispenser 44once, and to discharge the aerosol (S) from the first dispenser 36 atthe second discharge rate (V2) which is the critical rate or more,thereby fixing the particle (P) to a large area at one time. That is, itis possible to switch the discharge rate of the first dispenser 36 andwhether to use the second dispenser 44 as necessary, therebydistinguishing and using the fixing to a small area and the fixing to alarge area according to the situation.

In the above example, the aerosol (S) and the gas (G) are dischargedwith the same degree of spread, but the spread of the gas (G) dischargedfrom the second dispenser 44 can be reduced more than the firstdispenser 36 as in FIG. 11. Even in this case, as with the aboveexample, only the portion of overlapping the gas (G) among the aerosol(S) is accelerated so that the particle (P) among the aerosol (S) isfixed to the stage 10 only in the first portion 61 where the dischargeregion (R1) of the aerosol (S) and the discharge region (R2) of the gas(G) overlap. The non-fixed particle (NP) in the second portion 62 whichdoes not overlap the discharge region (R2) of the gas (G) among thedischarge region (R1) of the aerosol (S) is removed by the cleaning unit18.

In the above example, the aerosol (S) containing one type of theparticle (P) is discharged by using the first discharge apparatus 14 a,but two or more types of the particle (P) can be used. For example, inorder to discharge the aerosol containing the particle of a materialdifferent from that of the particle (P), a separate discharge apparatuswhich is the same as the first discharge apparatus 14 a can be furtherinstalled. Further, the first discharge apparatus 14 a can be configuredto discharge different aerosols according to the situation by using aswitching valve or the like.

In the above example, a nozzle having a circular opening is used, butconfigurations of the first dispenser 36 and the second dispenser 44 arenot limited thereto. For example, the first dispenser 36 and the seconddispenser 44 can have a rectangular or elliptical opening extending inthe y direction. In this case, since the first portion 61 can be formedlengthily in the y direction, the efficiency of the forming work can beimproved. If the fixing to a small region in the y direction isperformed by such a dispenser, the second dispenser 44 can be, forexample, disposed to be shifted from the first dispenser 36 in the ydirection so that the first portion 61 is shortened in the y direction.

Further, a plurality of first dispensers 36 and a plurality of seconddispensers 44 can be installed. For example, it is possible to disposethe plurality of first dispensers 36 and the plurality of seconddispensers 44 in an array form, and individually controlling thedischarge, respectively, thereby fixing the particle (P) to a pluralityof positions at the same time.

In the above example, the cleaning unit 18 removes the particle (P)which has not been fixed (that is, the non-fixed particle (NP)) to thestage 10 by the air supply apparatus 50 and the recovery apparatus 52,but in addition to or instead of the above, a mechanism other than theremoval by the airflow can also be used. For example, the cleaning unit18 can have a mechanism which physically sweeps the non-fixed particle(NP) directly, and can have an adhesive member which the non-fixedparticle (NP) is adhered. If the particle (P) is a magnetic particle,the cleaning unit 18 can have a mechanism for removing the non-fixedparticle (NP) by a magnetic force. Further, these can also be usedtogether.

As described above, although the present disclosure has been describedwith reference to the limited embodiments and drawings, the presentdisclosure is not limited thereto, and it is needless to say thatvarious modifications and changes can be made by those skilled in theart to which the present disclosure pertains within the technical spiritof the present disclosure and the equivalent scope of the claims.

1. A discharge apparatus for colliding a particle with a fixed surface to fix the particle to the fixed surface, the discharge apparatus comprising: a first dispenser for discharging an aerosol comprising the particle toward the fixed surface at a first discharge rate; and a second dispenser for discharging a gas toward the fixed surface at a second discharge rate faster than the first discharge rate, wherein the second dispenser discharges the gas so that the gas at least partially overlaps the aerosol discharged from the first dispenser to accelerate at least a portion of the aerosol toward the fixed surface to fix the particle to the fixed surface.
 2. The discharge apparatus of claim 1, wherein if the particle is discharged at the first discharge rate and collides with the fixed surface without acceleration from the gas then the particle is not substantially fixed to the fixed surface, and wherein if the particle is discharged at the second discharge rate and collides with the fixed surface then the particle is substantially fixed to the fixed surface.
 3. The discharge apparatus of claim 1, wherein if the particle is discharged at a critical rate or more then the particle is substantially fixed to the fixed surface, wherein the first discharge rate is smaller than the critical rate, and wherein the second discharge rate is greater than or equal to the critical rate.
 4. The discharge apparatus of claim 1, wherein the first dispenser and the second dispenser are configured so that a ratio of an area where the fixed particle covers a first portion of the fixed substrate and an area of the first portion is larger than a ratio of an area where the fixed particle covers a second portion of the fixed substrate and an area of the second portion if both the aerosol and the gas collide with the first portion of the fixed surface, and the aerosol collides with the second portion of the fixed surface but the gas does not collide with the second portion.
 5. The discharge apparatus of claim 4, wherein the first dispenser and the second dispenser are configured so that the particle is fixed in the first portion, and the particle is not fixed in the second portion.
 6. The discharge apparatus of claim 1, further comprising: a first dispenser moving mechanism for changing position and direction of the first dispenser; and a second dispenser moving mechanism for changing the position and direction of the second dispenser, wherein the first dispenser moving mechanism and the second dispenser moving mechanism are capable of changing a distance between the first dispenser and the second dispenser and an angle between a direction in which the first dispenser discharges the aerosol and a direction in which the second dispenser discharges the gas.
 7. A forming apparatus, comprising: a stage having a fixed surface; and a discharge apparatus of claim
 1. 8. The forming apparatus of claim 7, further comprising: a control unit for controlling the discharge apparatus so that a formed body having a three-dimensional shape is formed based on three-dimensional shape data of the formed body.
 9. The forming apparatus of claim 8, further comprising: a monitoring unit for monitoring the particle on the fixed surface, wherein the control unit determines a region on the fixed surface where the aerosol is discharged and a region on the fixed surface where the gas is discharged, based on information from the monitoring unit.
 10. The forming apparatus of claim 7, further comprising: a cleaning unit for removing the particle from the fixed surface if the particle has not been fixed to the fixed surface.
 11. The forming apparatus of claim 10, wherein the cleaning unit has an air supply apparatus for blowing off the particle from the fixed surface if the particle has not been fixed to the fixed surface.
 12. The forming apparatus of claim 10, wherein the cleaning unit has a recovery apparatus for recovering the particle from the fixed surface if the particle has not been fixed to the fixed surface.
 13. A method of producing a formed body in a predetermined shape from a fixed particle by colliding a particle with a fixed surface to fix the particle to the fixed surface, the method comprising: (a) discharging an aerosol comprising the particle toward the fixed surface at a first discharge rate, and also discharging a gas, wherein the gas a least partially overlaps with the aerosol, toward the fixed surface at a second discharge rate faster than the first discharge rate to accelerate at least a portion of the aerosol toward the fixed surface to fix the particle to the fixed surface; (b) cleaning that removes the particle if the particle has not been fixed to the fixed surface from the fixed surface; and (c) repeating steps (a) and (b) to form the formed body on the fixed surface.
 14. The method of producing the formed body of claim 13, further comprising: (d) moving the fixed surface downward in the vertical direction after step (b), and wherein step (c) further comprises: repeating steps (a), (b), and (d) to form the formed body having a three-dimensional shape.
 15. The method of producing the formed body of claim 13, further comprising: monitoring the particle on the fixed surface; and determining a position of a region on the fixed surface where the aerosol is discharged and a region on the fixed surface where the gas is discharged during step (a), based on information obtained in the monitoring.
 16. The method of producing the formed body of claim 14, further comprising: monitoring the particle on the fixed surface; and determining a position of a region on the fixed surface where the aerosol is discharged and a region on the fixed surface where the gas is discharged during step (a), based on information obtained in the monitoring. 